1-D polymeric photonic crystals as spectroscopic zero-power humidity sensors

被引:22
|
作者
Georgaki, M. -I. [1 ,2 ]
Botsialas, A. [1 ]
Argitis, P. [1 ]
Papanikolaou, N. [1 ]
Oikonomou, P. [1 ]
Raptis, I. [1 ,3 ]
Rysz, J. [4 ]
Budkowski, A. [4 ]
Chatzichristidi, M. [1 ,2 ]
机构
[1] NCSR Demokritos, Dept Microelect, Inst Adv Mat Physicochem Proc Nanotechnol & Micro, Athens, Greece
[2] Univ Athens, Dept Chem, GR-10680 Athens, Greece
[3] ThetaMetrisis SA, Athens, Greece
[4] Jagiellonian Univ, M Smoluchowski Inst Phys, Krakow, Poland
关键词
Polymer photonic crystal; Color humidity Sensor; Photolithography; PHOTORESIST; FILMS;
D O I
10.1016/j.mee.2013.11.003
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In the present study, a one dimensional polymeric photonic crystal is designed, fabricated and evaluated as a humidity sensor. The polymeric photonic crystal is consisted of a multilayer stack of sequential hydrophobic and hydrophilic layers applied using conventional photolithographic steps: spin-coating and DUV exposure. During exposure in a humidity environment, the hydrophilic layers of the sensor swell, hence growing its optical path and giving a red-shift of the reflectance peak and consequently a different color of the device. The spectroscopic humidity sensor does not require external power since its sensing ability is based on the reflectance peak shift of the photonic crystal in the visible spectrum (color change of the sensor). The design, fabrication, evaluation and characterization of the device and its evaluation as humidity sensor is presented. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:55 / 60
页数:6
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