A 256-site 3D CMOS microelectrode array for multipoint stimulation and recording in the central nervous system

This paper reports a four-channel 256-site three-dimensional (3D) microelectrode array assembly for use in multi-point neural stimulation and recording. The array is composed of multiple planar 2D multisite probes each of which includes on-chip CMOS circuitry for 3D addressing as well as per-channel 1-of-16 site selection. Optimization of the fabrication sequence enables the use of platform fuses and achieves high yield. The 3D assembly utilizes a simple serial data scheme loaded via programmable platform-based fused interconnects, making different array sizes possible. The fully-tested probes are in use mapping functional interconnections in the central nervous system.