Silicon pixel detector prototyping in SOI CMOS technology

被引:0
|
作者
Dasgupta, Roma [1 ]
Bugiel, Szymon [1 ]
Idzik, Marek [1 ]
Kapusta, Piotr [2 ]
Kucewicz, Wojciech [1 ]
Turala, Michal [2 ]
机构
[1] AGH Univ Sci & Technol, Krakow, Poland
[2] PAN Cracow, Inst Nucl Phys, Krakow, Poland
来源
关键词
SOI CMOS; monolithic pixel detector;
D O I
10.1117/12.2261485
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The Silicon-On-Insulator (SOI) CMOS is one of the most advanced and promising technology for monolithic pixel detectors design. The insulator layer that is implemented inside the silicon crystal allows to integrate sensors matrix and readout electronic on a single wafer. Moreover, the separation of electronic and substrate increases also the SOI circuits performance. The parasitic capacitances to substrate are significantly reduced, so the electronic systems are faster and consume much less power. The authors of this presentation are the members of international SOIPIX collaboration, that is developing SOI pixel detectors in 200 nm Lapis Fully-Depleted, Low-Leakage SOI CMOS. This work shows a set of advantages of SOI technology and presents possibilities for pixel detector design SOI CMOS. In particular, the preliminary results of a Cracow chip are presented.
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页数:6
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