CMOS detector technology

被引:1
|
作者
Hoffman, Alan
Loose, Markus
Suntharalingam, Vyshnavi
机构
关键词
CMOS; image sensor; APS; active pixel sensor; focal plane array; hybrid; HgCdTe; InSb; CCD; three-dimensionally stacked circuits; vertical; integration;
D O I
10.1007/1-4020-4330-9_42
中图分类号
P1 [天文学];
学科分类号
0704 ;
摘要
An entry level overview of state-of-the-art CMOS detector technology is presented Operating principles and system architecture are explained in comparison to the well-established CCD technology, followed by a discussion of important benefits of modern CMOS-based detector arrays. A number of unique CMOS features including different shutter modes and scanning concepts are described In addition, sub-field stitching is presented as a technique for producing very large imagers. After a brief introduction to the concept of monolithic CMOS sensors, hybrid detectors technology is introduced A comparison of noise reduction methods for CMOS hybrids is presented The final sections review CMOS fabrication processes for monolithic and vertically integrated image sensors.
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页码:377 / 402
页数:26
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