Mechanical behavior of a silicon micro-optical attenuator

被引：0
|
作者：
Suzuki, K [1 ]
Mercier, T [1 ]
Oguma, T [1 ]
Shibuya, T [1 ]
机构：
[1] NEC Corp Ltd, Silicon Syst Res Labs, Syst Dev & Fundamental Res, Tsukuba, Ibaraki 3058501, Japan
来源：
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年
关键词：
attenuator; WDM; MEMS mirror; and torsion beam;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
Two kinds of Micro-Electro-Mechanical-System, (MEMS) mirrors, supported by cantilever or torsion. beams, were designed and fabricated Their mechanical response to electrostatic force was theoretically analyzed according to the balance of the electrostatic moment with the spring torque. The measured capacitance change agrees well with the calculated one These micro-mirrors are expected to be applied to the attenuators for use in a wavelength-division-multiplexed (WDM) transport systems.
引用
收藏
页码：1306 / 1309
页数：4
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