共 50 条
- [2] Wafer scale manufacturing and integration of micro-optical systems [J]. GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II, 2001, 4437 : 79 - 90
- [3] Strategies for precision adhesive bonding of micro-optical systems [J]. COMPONENTS AND PACKAGING FOR LASER SYSTEMS, 2015, 9346
- [4] Integration of micro-optical systems for fluorescence detection in μTAS applications [J]. MICRO TOTAL ANALYSIS SYSTEMS 2000, PROCEEDINGS, 2000, : 163 - 166
- [5] Integrated micro-optical systems [J]. MICRO-OPTICS INTEGRATION AND ASSEMBLIES, 1998, 3289 : 13 - 21
- [6] A plethora of micro-optical systems [J]. GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II, 2001, 4437 : 125 - 133
- [7] Integration of the DRIE, MUMPs, and bulk micromachining for superior micro-optical systems [J]. MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, : 97 - 100
- [8] System integration of micro-optical systems for beam steering and modulation applications [J]. MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS III, 1998, 3276 : 88 - 95
- [9] Modular integration of microactuators and micro-optical benches [J]. MICRO-OPTICS 2008, 2008, 6992
- [10] Micro-optical integration spurs mass production [J]. LASER FOCUS WORLD, 1998, 34 (03): : 77 - +