Integration strategies for micro-optical systems

被引:0
|
作者
Kirk, AG [1 ]
Menard, M [1 ]
Dong, P [1 ]
Bisaillon, E [1 ]
机构
[1] McGill Univ, Dept Elect & Comp Engn, Montreal, PQ H3A 2A7, Canada
关键词
micro-optics; optical interconnects; alignment; planar optics; diffractive optics;
D O I
10.1117/12.554942
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A wide variety of integration strategies for micro-optical systems have been employed. Here we review some of these and comment on their relative strengths and weaknesses. In particular we compare approaches that are based on monolithic fabrication with those that make use of discrete components. As applications we consider free-space optical interconnects, telecommunications optical space switches and radiation mode interconnects for optical waveguides.
引用
收藏
页码:83 / 88
页数:6
相关论文
共 50 条
  • [1] The Building Blocks of Micro-Optical Systems Integration: A Primer
    Wrigley, Jennifer
    [J]. PHOTONICS SPECTRA, 2010, 44 (12) : 46 - 48
  • [2] Wafer scale manufacturing and integration of micro-optical systems
    Kathman, A
    Boomgarden, M
    [J]. GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II, 2001, 4437 : 79 - 90
  • [3] Strategies for precision adhesive bonding of micro-optical systems
    Mueller, Tobias
    Venu, Vyshak Kotnur
    Haag, Sebastian
    Zontar, Daniel
    Sauer, Sebastian
    Wenzel, Christian
    Brecher, Christian
    [J]. COMPONENTS AND PACKAGING FOR LASER SYSTEMS, 2015, 9346
  • [4] Integration of micro-optical systems for fluorescence detection in μTAS applications
    Roulet, JC
    Herzig, HP
    Verpoorte, E
    de Rooij, NF
    Dändliker, R
    [J]. MICRO TOTAL ANALYSIS SYSTEMS 2000, PROCEEDINGS, 2000, : 163 - 166
  • [5] Integrated micro-optical systems
    Kathman, A
    [J]. MICRO-OPTICS INTEGRATION AND ASSEMBLIES, 1998, 3289 : 13 - 21
  • [6] A plethora of micro-optical systems
    Sweatt, WC
    Warren, ME
    Kemme, SA
    Christenson, TR
    Blum, O
    Sinclair, MB
    Butler, MA
    Gentry, SM
    [J]. GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II, 2001, 4437 : 125 - 133
  • [7] Integration of the DRIE, MUMPs, and bulk micromachining for superior micro-optical systems
    Wu, MC
    Lai, CF
    Fang, WL
    [J]. MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, : 97 - 100
  • [8] System integration of micro-optical systems for beam steering and modulation applications
    Glockner, S
    Dannberg, P
    Goring, R
    Bohrisch, F
    Bucker, P
    [J]. MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS III, 1998, 3276 : 88 - 95
  • [9] Modular integration of microactuators and micro-optical benches
    Schuele, S.
    Hollenbach, U.
    Mohr, J.
    Li, J.
    Vorreau, P.
    Efremov, A.
    Leuthold, J.
    Schonhardt, S.
    [J]. MICRO-OPTICS 2008, 2008, 6992
  • [10] Micro-optical integration spurs mass production
    Erlich, A
    [J]. LASER FOCUS WORLD, 1998, 34 (03): : 77 - +