A novel electrostatic micro-actuator class and its application potential for optical MEMS

被引：0
|
作者：
Schenk, H. [1 ,2 ]
Conrad, H. [1 ]
Gaudet, M. [1 ]
Uhlig, S. [1 ]
Kaiser, B. [1 ]
Langa, S. [1 ]
Stolz, M. [1 ]
Schimmanz, K. [1 ,2 ]
机构：
[1] Fraunhofer Inst Photon Microsyst, Dresden, Germany
[2] Brandenburg Tech Univ Cottbus, Chair Micro & Nanosyst, Cottbus, Germany
来源：
2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2016年
关键词：
micro actuator; electrostatic actuator; pull-in; MEMS; MOEMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Electrostatic actuation is highly efficient at micro and nanoscale. However, due to pull-in instability large deflection requires large electrode separation and thus large driving voltages. We report on a novel electrostatic actuator class, which allows deflections in the mu m-range based on electrode separations of a few 100 nm, only. Specifically designed and fabricated actuators allow for a large variety of motion patterns including out-of-plane and in-plane motion as well as membrane deformation. A CMOS compatible and RoHs compliant fabrication process enable straight-forward integration. The potential for actuator based Optical MEMS devices is discussed.
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页数：2
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