Development of A Novel Bidirectional Electrothermal Actuator and its Application to RF MEMS switch

被引：0
|
作者：
Zhu, Yan-qing [1 ]
Han, Lei [1 ]
Qin, Ming [1 ]
Huang, Qing-an [1 ]
Jiang, Ming-xia [1 ]
机构：
[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Jiangsu, Peoples R China
来源：
2014 9TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2014年
关键词：
bidirectional; electrothermal actuator; low voltage; RF MEMS switch; DESIGN;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
This paper presents the design and testing results of an electrothermally driven MEMS (microelectromechanical systems) actuator. Different from conventional uni-directional thermal actuators, this in-plane bi-directional electrothermal actuator is capable of producing displacements in two directions as a single device. The RF MEMS switch driven by this cascaded electrothermal actuator is also proposed. Due to this bidirectional actuator, the proposed switch can not only realize the OFF-state to ON-state shifting but also provide an additional deep OFF-state. At the deep OFF state, the isolation better than 30 dB can be achieved at the whole frequency range of 0 similar to 40 GHz.
引用
收藏
页码：180 / 185
页数：6
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