Development of A Novel Bidirectional Electrothermal Actuator and its Application to RF MEMS switch

被引：0

作者：

Zhu, Yan-qing ^{[1
]}

Han, Lei ^{[1
]}

Qin, Ming ^{[1
]}

Huang, Qing-an ^{[1
]}

Jiang, Ming-xia ^{[1
]}

机构：

[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Jiangsu, Peoples R China

来源：

2014 9TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2014年

关键词：

bidirectional; electrothermal actuator; low voltage; RF MEMS switch; DESIGN;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This paper presents the design and testing results of an electrothermally driven MEMS (microelectromechanical systems) actuator. Different from conventional uni-directional thermal actuators, this in-plane bi-directional electrothermal actuator is capable of producing displacements in two directions as a single device. The RF MEMS switch driven by this cascaded electrothermal actuator is also proposed. Due to this bidirectional actuator, the proposed switch can not only realize the OFF-state to ON-state shifting but also provide an additional deep OFF-state. At the deep OFF state, the isolation better than 30 dB can be achieved at the whole frequency range of 0 similar to 40 GHz.

引用

页码：180 / 185

页数：6

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