Readout Interface for Capacitive MEMS Microphone in CMOS Technology

被引：0

作者：

Arbet, Daniel ^{[1
]}

Nagy, Gabriel ^{[1
]}

Kovac, Martin ^{[1
]}

Stopjakova, Viera ^{[1
]}

Nagy, Lukas ^{[1
]}

机构：

[1] Slovak Univ Technol Bratislava, Fac Elect Engn & Informat Technol, Inst Elect & Photon, Bratislava, Slovakia

来源：

2015 22ND INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS & SYSTEMS (MIXDES) | 2015年

关键词：

Readout interface; MEMS microphone; fully differential difference amplifier; low harmonic distortion; low noise; high dynamic range;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

This paper presents the frontend part of the readout interface for a capacitive MEMS microphone designed and fabricated in 0.35 mu m CMOS technology. The developed readout interface will be used in a noise dosimeter applicable in very noisy and harsh environment. The prototype chips were measured and the main parameters evaluated. The achieved results demonstrate low harmonic distortion, low noise and high dynamic range of the developed readout interface.

引用

页码：370 / 374

页数：5

共 50 条

[31] Noise and mismatch optimization for capacitive MEMS readout
张翀
吴其松
尹韬
杨海钢
半导体学报, 2009, 30 (11) : 88 - 93
[32] A CMOS full-range linear integrated interface for differential capacitive sensor readout
Barile, G.
Ferri, G.
Parente, F. R.
Stornelli, V.
Sisinni, E.
Depari, A.
Flammini, A.
SENSORS AND ACTUATORS A-PHYSICAL, 2018, 281 : 130 - 140
[33] Noise and mismatch optimization for capacitive MEMS readout
Zhang Chong
Wu Qisong
Yin Tao
Yang Haigang
JOURNAL OF SEMICONDUCTORS, 2009, 30 (11)
[34] A Monolithic, Low-Noise, Capacitive Readout Interface Circuit for CMOS-MEMS Resonator-Based Gravimetric Chemical Gas Sensors
Sutri, N. Y.
Dennis, J. O.
Khir, M. H. Md
Ahmed, A. Y.
Mian, M. U.
PROCEEDINGS OF THE 2015 12TH IEEE AFRICON INTERNATIONAL CONFERENCE - GREEN INNOVATION FOR AFRICAN RENAISSANCE (AFRICON), 2015,
[35] Acoustical-Thermal Noise in a Capacitive MEMS Microphone
Kim, Byung-Hun
Lee, Hwa-Sun
IEEE SENSORS JOURNAL, 2015, 15 (12) : 6853 - 6860
[36] FIRST MEMS MICROPHONE BASED ON CAPACITIVE TRANSDUCTION IN VACUUM
Dagher, Samer
Souchon, Frederic
Berthelot, Audrey
Durand, Stephane
Joet, Loic
2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020, : 838 - 841
[37] A Sound Activity Detector Embedded Low-Power MEMS Microphone Readout Interface for Speech Recognition
Yang, Youngtae
Cho, Jun Soo
Lee, Byunggyu
Kim, Suhwan
2019 IEEE/ACM INTERNATIONAL SYMPOSIUM ON LOW POWER ELECTRONICS AND DESIGN (ISLPED), 2019,
[38] Design of a 5mW Capacitive Accelerometer based on MEMS and CMOS Technology
Ruan Yue
Ji Lu-jun
Tang Ying
Yao Wen-ji
Wang Zhang-quan
Xu Sen
PROCEEDINGS OF THE 10TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION (WCICA 2012), 2012, : 5102 - 5107
[39] A Monolithic CMOS MEMS Accelerometer with Low Noise Gain Tunable Interface in 0.18μm CMOS MEMS Technology
Lin, Yi-Da
Lin, Jian-Yuan
Wang, Chun-Kai
Fan, Long-Sheng
Wen, Kuei-Ann
2012 IEEE SENSORS PROCEEDINGS, 2012, : 1332 - 1335
[40] A MEMS Microphone Interface Based on a CMOS LC Oscillator and a Digital Sigma-Delta Modulator
Cardes, Fernando
Jevtic, Ruzica
Hernandez, Luis
Wiesbauer, Andreas
Straeussnigg, Dietmar
Gaggl, Richard
2015 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS (ISCAS), 2015, : 2233 - 2236

← 1 2 3 4 5 →