Readout Interface for Capacitive MEMS Microphone in CMOS Technology

被引：0
|
作者：
Arbet, Daniel [1 ]
Nagy, Gabriel [1 ]
Kovac, Martin [1 ]
Stopjakova, Viera [1 ]
Nagy, Lukas [1 ]
机构：
[1] Slovak Univ Technol Bratislava, Fac Elect Engn & Informat Technol, Inst Elect & Photon, Bratislava, Slovakia
来源：
2015 22ND INTERNATIONAL CONFERENCE MIXED DESIGN OF INTEGRATED CIRCUITS & SYSTEMS (MIXDES) | 2015年
关键词：
Readout interface; MEMS microphone; fully differential difference amplifier; low harmonic distortion; low noise; high dynamic range;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
This paper presents the frontend part of the readout interface for a capacitive MEMS microphone designed and fabricated in 0.35 mu m CMOS technology. The developed readout interface will be used in a noise dosimeter applicable in very noisy and harsh environment. The prototype chips were measured and the main parameters evaluated. The achieved results demonstrate low harmonic distortion, low noise and high dynamic range of the developed readout interface.
引用
收藏
页码：370 / 374
页数：5
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