Detachable glass micro/nanofluidic device

被引:22
|
作者
Ohta, Ryoichi [1 ]
Mawatari, Kazuma [1 ,2 ]
Takeuchi, Tomoaki [2 ]
Morikawa, Kyojiro [2 ]
Kitamori, Takehiko [1 ,2 ]
机构
[1] Univ Tokyo, Grad Sch Engn, Dept Bioengn, Tokyo 1138656, Japan
[2] Univ Tokyo, Grad Sch Engn, Dept Appl Chem, Tokyo 1138656, Japan
关键词
LOW-TEMPERATURE; NANOFLUIDIC CHANNELS; ROOM-TEMPERATURE; CHIPS; ELECTROPHORESIS;
D O I
10.1063/1.5087003
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
Glass is one of the most ideal materials for micro/nanofluidic devices due to its excellent optical transparency, resistance to a wide range of solvents and reagents, and easy to modify surfaces by silane-coupling reagents. From a practical point of view, glass is a hard material and is suitable for real applications. One of the advantages of glass is its reusability; however, this reusability is difficult to realize in certain conditions. Washing or re-modification of micro/nanofluidic channels is sometimes difficult due to the ultrasmall space in these channels. If the glass devices are detachable, it is easy to access the channel surface, and the channels can be cleaned and re-modified. When the substrates are bonded again, the devices are fabricated easily without repeating laborious and expensive micro/nano-fabrication processes. This technology gives researchers and users a choice of glass substrates in fundamental research studies and real-time applications. In this study, we propose a detachable glass micro/nanofluidic device by our low temperature bonding method. The surface bonding energy is controlled to realize both high pressure capacity for micro/nanofluidics and easy separation of glass substrates without fracturing. As a result, at least four times detaching and bonding is confirmed.
引用
收藏
页数:7
相关论文
共 50 条
  • [1] Recycled low-temperature direct bonding of Si/glass and glass/glass chips for detachable micro/nanofluidic devices
    Chenxi Wang
    Hui Fang
    Shicheng Zhou
    Xiaoyun Qi
    Fanfan Niu
    Wei Zhang
    Yanhong Tian
    Tadatomo Suga
    [J]. Journal of Materials Science & Technology, 2020, 46 (11) : 156 - 167
  • [2] Recycled low-temperature direct bonding of Si/glass and glass/glass chips for detachable micro/nanofluidic devices
    Wang, Chenxi
    Fang, Hui
    Zhou, Shicheng
    Qi, Xiaoyun
    Niu, Fanfan
    Zhang, Wei
    Tian, Yanhong
    Suga, Tadatomo
    [J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2020, 46 (46) : 156 - 167
  • [3] Relationship between bonding strength and surface roughness in low-temperature bonding of glass for micro/nanofluidic device
    Ohta, Ryoichi
    Morikawa, Kyojiro
    Tsuyama, Yoshiyuki
    Kitamori, Takehiko
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2024, 34 (01)
  • [4] Electropreconcentration of nanoparticles using a radial micro-nanofluidic device
    Aizel, K.
    Fouillet, Y.
    Pudda, C.
    [J]. JOURNAL OF NANOPARTICLE RESEARCH, 2014, 16 (11)
  • [5] Implementation of a nanochannel open/close valve into a glass nanofluidic device
    Sano, Hiroki
    Kazoe, Yutaka
    Morikawa, Kyojiro
    Kitamori, Takehiko
    [J]. MICROFLUIDICS AND NANOFLUIDICS, 2020, 24 (10)
  • [6] Glass-based nanofluidic device for biomolecule preconcentration study
    Svarnas, P.
    Plecis, A.
    Nanteuil, C.
    Duong, D.
    David, C.
    Muller, M.
    Chen, Y.
    [J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2008, 44 (03): : 245 - 253
  • [7] Electropreconcentration of nanoparticles using a radial micro-nanofluidic device
    K. Aïzel
    Y. Fouillet
    C. Pudda
    [J]. Journal of Nanoparticle Research, 2014, 16
  • [8] Micro/Nanofluidic Device for Single-Cell-Based Assay
    Kwang-Seok Yun
    Euisik Yoon
    [J]. Biomedical Microdevices, 2005, 7 : 35 - 40
  • [9] Micro/nanofluidic device for single-cell-based assay
    Yun, KS
    Yoon, E
    [J]. BIOMEDICAL MICRODEVICES, 2005, 7 (01) : 35 - 40
  • [10] Implementation of a nanochannel open/close valve into a glass nanofluidic device
    Hiroki Sano
    Yutaka Kazoe
    Kyojiro Morikawa
    Takehiko Kitamori
    [J]. Microfluidics and Nanofluidics, 2020, 24