Electric degradation behavior of hot filament in diamond chemical vapor deposition

被引：0
|
作者：
Chen, GC [1 ]
Huang, RF [1 ]
Wen, LS [1 ]
机构：
[1] Acad Sinica, Inst Met Res, Shenyang 110015, Peoples R China
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1999年 / 17卷 / 05期
关键词：
D O I：
10.1116/1.582029
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
[No abstract available]
引用
收藏
页码：3108 / 3110
页数：3
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