Physical properties of reactive RF sputtered a-IZON thin films

被引：0
|
作者：
Ortega, J. J. [1 ]
Escobedo-Galvan, C. R. [2 ]
Avelar-Munoz, F. [1 ]
Ortiz-Hernandez, A. A. [3 ]
Tototzintle-Huitle, H. [1 ]
Falcony, C. [4 ]
Araiza, J. J. [1 ]
机构：
[1] Univ Autonoma Zacatecas, Unidad Acad Fis, Zacatecas, Mexico
[2] Inst Politecn Nacl, Ctr Estudios Cient & Tecnol 18, Zacatecas, Mexico
[3] Univ Politecn Zacatecas, Dept Ingn Mecatron, Zacatecas, Mexico
[4] Inst Politecn Nacl, Ctr Invest & Estudios Avanzados, Dept Fis, Mexico City, DF, Mexico
来源：
REVISTA MEXICANA DE FISICA | 2019年 / 65卷 / 02期
关键词：
Indium zinc oxynitride; amorphous oxynitride; spectral ellipsometry; amorphous semiconductor; IZON; INDIUM ZINC-OXIDE; OXYNITRIDE;
D O I：
10.31349/RevMexFis.65.133
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The physical properties of amorphous indium zinc oxynitride (a-IZON) thin films, which were deposited at room temperature by reactive RF magnetron sputtering, were investigated. The results of the investigations indicated that the a-IZON films possessed excellent qualities: high transparency with a very low resistivity from 10(-3) Omega.cm to 10(-4) Omega.cm, while the carrier concentration showed values over 10(20) cm(-3) with mobility between 10 and 21 cm(2).V-1.s(-1). The incorporated nitrogen reduces the typical crystallization of IZO and favors the deposition of transparent thin films. These results show that the IZON is an ideal amorphous material for applications in transparent and flexible optoelectronic devices.
引用
收藏
页码：133 / 138
页数：6
相关论文
共 50 条
  • [21] PHYSICAL PROPERTIES of RF-SPUTTERED ZNSE THIN FILMS FOR PHOTOVOLTAIC APPLICATIONS: INFLUENCE of FILM THICKNESS
    Ion, L.
    Iftimie, S.
    Radu, A.
    Antohe, V. A.
    Toma, O.
    Antohe, S.
    [J]. PROCEEDINGS OF THE ROMANIAN ACADEMY SERIES A-MATHEMATICS PHYSICS TECHNICAL SCIENCES INFORMATION SCIENCE, 2021, 22 (01): : 25 - 34
  • [22] Post-Annealing Effects on the Physical and Optical Waveguiding Properties of RF Sputtered ZnO Thin Films
    Meriche, Faiza
    Touam, Tahar
    Chelouche, Azeddine
    Dehimi, Mohamed
    Solard, Jeanne
    Fischer, Alexis
    Boudrioua, Azzedine
    Peng, Lung-Han
    [J]. ELECTRONIC MATERIALS LETTERS, 2015, 11 (05) : 862 - 870
  • [23] Post-annealing effects on the physical and optical waveguiding properties of RF sputtered ZnO thin films
    Faiza Meriche
    Tahar Touam
    Azeddine Chelouche
    Mohamed Dehimi
    Jeanne Solard
    Alexis Fischer
    Azzedine Boudrioua
    Lung-Han Peng
    [J]. Electronic Materials Letters, 2015, 11 : 862 - 870
  • [24] Thickness Effect on Some Physical Properties of RF Sputtered ZnTe Thin Films for Potential Photovoltaic Applications
    Manica, Dumitru
    Antohe, Vlad-Andrei
    Moldovan, Antoniu
    Pascu, Rovena
    Iftimie, Sorina
    Ion, Lucian
    Suchea, Mirela Petruta
    Antohe, Stefan
    [J]. NANOMATERIALS, 2021, 11 (09)
  • [25] Effect of rf power on the properties of rf magnetron sputtered ZnO:Al thin films
    Saad, M.
    Kassis, A.
    [J]. MATERIALS CHEMISTRY AND PHYSICS, 2012, 136 (01) : 205 - 209
  • [26] Effect of thermal annealing on structural, optical and electrical properties of RF reactive magnetron sputtered CdO thin films
    Kumar, Gadipelly Anil
    Reddy, Musugu Ramana
    Reddy, Katta Narasimha
    [J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2014, 68 (01):
  • [27] Influence of the reactive N2 gas flow on the properties of rf-sputtered ZnO thin films
    Wang, Jinzhong
    Sallet, Vincent
    Jomard, Francois
    do Rego, Ana M. Botelho
    Elamurugu, Elangovan
    Martins, Rodrigo
    Fortunato, Elvira
    [J]. THIN SOLID FILMS, 2007, 515 (24) : 8780 - 8784
  • [28] Photo-induced hydrophilic properties of reactive RF magnetron sputtered TiO2 thin films
    Xiong, Junjie
    Das, Sachindra Nath
    Kim, Sungyeon
    Lim, Jinhyong
    Choi, Hyun
    Myoung, Jae-Min
    [J]. SURFACE & COATINGS TECHNOLOGY, 2010, 204 (21-22): : 3436 - 3442
  • [29] PROPERTIES OF RF SPUTTERED, MERCURY CADMIUM TELLURIDE THIN-FILMS
    CORNELY, RH
    SUCHOW, L
    DERIDDER, D
    GABARA, T
    DIODATO, P
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (03) : C123 - C124
  • [30] Structural, morphological and optical properties of rf - Sputtered CdS thin films
    Toma, Ovidiu
    Ion, Lucian
    Iftimie, Sorina
    Radu, Adrian
    Antohe, Stefan
    [J]. MATERIALS & DESIGN, 2016, 100 : 198 - 203
12345