A New Method of Processing High-precision Micro-hole with The Femtosecond Laser

被引：3
|
作者：
Yang, Xiaojun [1 ]
Li, Ming [1 ]
Wang, Li [2 ]
Zhao, Hualong [1 ]
Cheng, Guagnhua [1 ]
机构：
[1] Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China
[2] Shenyang Liming Aeroengn Grp Corp Ltd, AVIC, Shenyang 110043, Peoples R China
来源：
MATERIALS, MECHANICAL ENGINEERING AND MANUFACTURE, PTS 1-3 | 2013年 / 268-270卷
关键词：
femtosecond laser; PZT(lead zirconate titanate piezoelectric ceramics); Laser Scanning;
D O I：
10.4028/www.scientific.net/AMM.268-270.382
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Based on the femtosecond laser processing technology and PZT driving scanning technology, high-precision micro- manufacturing technology is developed. By adjusting the laser parameters and scanning parameters to get micro-hole machining on the flat or curved surface. Hole's size and surface morphology is observed by using phase contrast microscopy and scanning electron microscopy observations, and the surface roughness is analyzed by the surface profile instrument. The feasibility of diesel injector nozzle processing is verified in practical industry applications. The results show that this method of making micro hole has significant advantages, such as high precision, good consistency, without burrs, good surface roughness and high efficiency. These characteristics can meet the practical application requirements and can be used in various industrial fields.
引用
收藏
页码：382 / +
页数：2
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