High-precision micro-through-hole array in quartz glass machined by infrared picosecond laser

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作者：
Institute of Laser Engineering, Beijing University of Technology, Beijing [1 ]
100124, China
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来源：
Appl Phys A | / 3卷 / 1163-1169期
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Engineering Village;
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摘要：
Ablation thresholds - Fundamental properties - Glass-like materials - High-precision - Large-scale applications - Laser micro-machining - Machined surface - Quantitative design
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