Inversion Domain Boundaries in GaN Wires Revealed by Coherent Bragg Imaging

被引:61
|
作者
Labat, Stephane [1 ]
Richard, Marie-Ingrid [1 ,2 ]
Dupraz, Maxime [3 ,4 ]
Gailhanou, Marc [1 ]
Beutier, Guillaume [3 ,4 ]
Verdier, Marc [3 ,4 ]
Mastropietro, Francesca [1 ]
Cornelius, Thomas W. [1 ]
Schuelli, Tobias U. [2 ]
Eymery, Joel [5 ,6 ]
Thomas, Olivier [1 ]
机构
[1] Univ Toulon & Var, Aix Marseille Univ, CNRS, UMR IM2NP 7334, F-13397 Marseille, France
[2] ID01 ESRF, F-38043 Grenoble, France
[3] Univ Grenoble Alpes, SIMAP, F-38000 Grenoble, France
[4] CNRS, SIMAP, F-38000 Grenoble, France
[5] Univ Grenoble Alpes, F-38000 Grenoble, France
[6] CEA, Nanophys & Semicond Grp, INAC SP2M, F-38000 Grenoble, France
关键词
GaN wires; inversion domain boundary; coherent X-ray Bragg imaging; displacement field; CRYSTAL; STRAIN; DISLOCATIONS; SCATTERING; GROWTH; FIELD;
D O I
10.1021/acsnano.5b03857
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Interfaces between polarity domains in nitride semiconductors, the so-called Inversion Domain Boundaries (IDB), have been widely described, both theoretically and experimentally, as perfect interfaces (without dislocations and vacancies). Although ideal planar IDBs are well documented, the understanding of their configurations and interactions inside crystals relies on perfect-interface assumptions. Here, we report on the microscopic configuration of IDBs inside n-doped gallium nitride wires revealed by coherent X-ray Bragg imaging. Complex IDB configurations are evidenced with 6 nm resolution and the absolute polarity of each domain is unambiguously identified. Picoscale displacements along and across the wire are directly extracted from several Bragg reflections using phase retrieval algorithms, revealing rigid relative displacements of the domains and the absence of microscopic strain away from the IDBs. More generally, this method offers an accurate inner view of the displacements and strain of interacting defects inside small crystals that may alter optoelectronic properties of semiconductor devices.
引用
收藏
页码:9210 / 9216
页数:7
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