Scalability of capacitive RF MEMS switches

被引：0
|
作者：
Ulm, M [1 ]
Reimann, M [1 ]
Walter, T [1 ]
Müller-Fiedler, R [1 ]
Kasper, E [1 ]
机构：
[1] Robert Bosch GmbH, Corp Res & Dev, D-70839 Gerlingen, Germany
来源：
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年
关键词：
MEMS; switch; microwave;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
MEMS capacitive shunt switches have attracted large interest in various microwave or min-wave applications, such as low power communication systems or phased arrayed antennas [1,2,3]. Two types of RF MEMS switches are discussed with respect to their impedance matching, scalability in frequency and related mechanical limitations. As a result, a W-band MEMS switch with a measured insertion loss of < 0.3 dB and a isolation of > 33 dB at 94 GHz is presented.
引用
收藏
页码：1536 / 1538
页数：3
相关论文
共 50 条
  • [1] RF actuation of capacitive MEMS switches
    Reid, JR
    Starman, LA
    Webster, RT
    [J]. 2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2003, : 1919 - 1922
  • [2] Pulse RF Operation of MEMS Capacitive Switches
    Palego, Cristiano
    Deng, Jie
    Halder, Subrata
    Peng, Zhen
    Hwang, James C. M.
    Forehand, David I.
    Goldsmith, Charles L.
    [J]. 2009 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC 2009), 2009, : 395 - +
  • [3] Lifetime characterization of capacitive RF MEMS switches
    Goldsmith, C
    Ehmke, J
    Malczewski, A
    Pillans, B
    Eshelman, S
    Yao, Z
    Brank, J
    Eberly, M
    [J]. 2001 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2001, : 227 - 230
  • [4] Lifetime characterization of capacitive RF MEMS switches
    Ziaei, A
    Dean, T
    Mancuso, Y
    [J]. Smart Structures and Materials 2005: Smart Electronics, Mems, BioMems, and Nanotechnology, 2005, 5763 : 388 - 396
  • [5] Lifetime characterization of capacitive RF MEMS switches
    Ziaei, A
    Dean, T
    Polizzi, JP
    [J]. RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS IV, 2005, 5716 : 113 - 121
  • [6] Hermeticity testing of capacitive RF MEMS switches
    van der Wel, P. J.
    Stulemeijer, J.
    Bielen, J. A.
    Theunis, F. G. A.
    den Dekker, A.
    van Gils, M. A. J.
    Havens, R. J.
    [J]. 2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL, 2008, : 691 - 692
  • [7] Pulse RF Operation of MEMS Capacitive Switches
    Palego, Cristiano
    Deng, Jie
    Halder, Subrata
    Peng, Zhen
    Hwang, James C. M.
    Forehand, David I.
    Goldsmith, Charles L.
    [J]. 2009 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3, 2009, : 1748 - +
  • [8] Linearity and RF Power Handling on Capacitive RF MEMS Switches
    Molinero, David
    Aghaei, Samira
    Morris, Arthur S., III
    Cunningham, Shawn
    [J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2019, 67 (12) : 4905 - 4913
  • [9] Linearity and RF Power Handling of Capacitive RF MEMS Switches
    Molinero, David
    Aghaei, Samira
    Morris, Art
    Cunningham, Shawn
    [J]. 2019 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS), 2019, : 793 - 796
  • [10] Influence of the substrate on the lifetime of capacitive RF MEMS switches
    Czarnecki, P.
    Rottenberg, X.
    Soussan, P.
    Ekkels, P.
    Muller, P.
    Nolmans, P.
    De Raedt, W.
    Tilmans, H. A. C.
    Puers, R.
    Marchand, L.
    De Wolf, I.
    [J]. MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 172 - +
12345