Pulse RF Operation of MEMS Capacitive Switches

被引：0
|
作者：
Palego, Cristiano [1 ]
Deng, Jie [1 ]
Halder, Subrata [1 ]
Peng, Zhen [1 ]
Hwang, James C. M. [1 ]
Forehand, David I. [2 ]
Goldsmith, Charles L. [2 ]
机构：
[1] Lehigh Univ, ECE, 5 E Packer Ave, Bethlehem, PA 18015 USA
[2] MEMtron Corp, Plano, TX 75075 USA
来源：
2009 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC 2009) | 2009年
关键词：
microelectromechanical devices; microwave devices; microwave switches; pulse measurement;
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
Shifts in the pull-in voltage of electrostatically actuated MEMS capacitive switches were characterized under pulse RF excitation, which allowed the electrical and thermal effects of the RF excitation to be separated. The resulted multi-physics model accurately predicted the pull-in voltage shift under different pulse powers and duty cycles. By comparing the power capacity of switches made of aluminum or molybdenum, a new figure of merit is proposed for selecting the optimum material for the fabrication of high-power MEMS capacitive switches.
引用
收藏
页码：395 / +
页数：2
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