Scalability of capacitive RF MEMS switches

被引：0

作者：

Ulm, M ^{[1
]}

Reimann, M ^{[1
]}

Walter, T ^{[1
]}

Müller-Fiedler, R ^{[1
]}

Kasper, E ^{[1
]}

机构：

[1] Robert Bosch GmbH, Corp Res & Dev, D-70839 Gerlingen, Germany

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

MEMS; switch; microwave;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

MEMS capacitive shunt switches have attracted large interest in various microwave or min-wave applications, such as low power communication systems or phased arrayed antennas [1,2,3]. Two types of RF MEMS switches are discussed with respect to their impedance matching, scalability in frequency and related mechanical limitations. As a result, a W-band MEMS switch with a measured insertion loss of < 0.3 dB and a isolation of > 33 dB at 94 GHz is presented.

引用

页码：1536 / 1538

页数：3

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