Three-dimensional staggered herringbone mixer fabricated by femtosecond laser direct writing

被引:20
|
作者
Lin, Di [1 ,2 ]
He, Fei [1 ]
Liao, Yang [1 ]
Lin, Jintian [1 ,2 ]
Liu, Changning [1 ,2 ]
Song, Jiangxin [1 ,2 ]
Cheng, Ya [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
基金
中国国家自然科学基金;
关键词
femtosecond laser; microchannel in glass; 3D direct writing; MICROFLUIDIC CHANNELS; MICROMIXERS; MICROFABRICATION; PHYSICS; GLASS;
D O I
10.1088/2040-8978/15/2/025601
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report on the fabrication of a three-dimensional (3D) staggered herringbone mixer (SHM) on a fused silica chip by femtosecond laser microfabrication, enabled by the 3D nature of femtosecond laser direct writing. We theoretically and experimentally show that a 3D SHM with patterns on not only the bottom floor but also the side walls can reduce the mixing length by almost half as compared with the conventional 2D SMH mixer.
引用
收藏
页数:5
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