Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling

被引：0
|
作者：
Legrain, A. [1 ]
Janson, T. G. [1 ]
Berenschot, J. W. [1 ]
Krijnen, G. J. M. [1 ]
Abelmann, L. [1 ]
Tas, N. R. [1 ]
机构：
[1] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands
来源：
2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013) | 2013年
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D O I：
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中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application. We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand.
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收藏
页码：538 / 541
页数：4
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