Dynamic analysis of flexural vibration mode of an atomic force microscope cantilever with a sidewall probe in liquid

被引：3
|
作者：
Payam, Amir F. [1 ]
Nguyen Duy Vy [2 ,3 ]
机构：
[1] Ulster Univ, Sch Engn, Newtownabbey, North Ireland
[2] Ton Duc Thang Univ, Adv Inst Mat Sci, Lab Appl Phys, Ho Chi Minh City, Vietnam
[3] Ton Duc Thang Univ, Fac Appl Sci, Ho Chi Minh City, Vietnam
来源：
MICROSCOPY RESEARCH AND TECHNIQUE | 2021年 / 84卷 / 04期
关键词：
analytical method; atomic force microscope; hydrodynamic effect; mode sensitivity; sidewall cantilever; AFM CANTILEVER; RESONANT-FREQUENCY; SENSITIVITY; STIFFNESS; BEHAVIOR;
D O I：
10.1002/jemt.23636
中图分类号：
R602 [外科病理学、解剖学]; R32 [人体形态学];
学科分类号：
100101 ;
摘要：
In this paper, dynamic behavior and the resonance frequencies of flexural vibration modes of an atomic force microscope cantilever with sidewall probe immersed in liquid to surface stiffness variations have been investigated and a closed-form expression is derived. Using numerical analysis, the flexural resonance frequencies of microcantilever immersed in liquid are calculated and the results are compared with the air environment. Then, the effect of sidewall length and normal stiffness on the frequency is investigated. Moreover, the surface-coupled effect between the cantilever and simple surface when the cantilever is close to the surface is considered and its effect on the quality factors of the first to fourth modes is studied.
引用
收藏
页码：782 / 788
页数：7
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