A Nonlinear MEMS Resonator for Generating AC Voltages Without Electronics

被引：0

作者：

Stevens, Colin B. ^{[1
]}

Dean, Robert N. ^{[1
]}

Perkins, Edmon ^{[2
]}

Li, Chong ^{[2
]}

Beal, Aubrey N. ^{[1
]}

Flowers, George T. ^{[2
]}

机构：

[1] Auburn Univ, ECE Dept, Auburn, AL 36849 USA

[2] Auburn Univ, ME Dept, Auburn, AL 36849 USA

来源：

2019 IEEE SOUTHEASTCON | 2019年

关键词：

nonlinear systems; MEMS; resonator; harsh environments; PARALLEL-PLATE;

D O I：

10.1109/southeastcon42311.2019.9020649

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

High temperature applications exists where AC voltage generation would be useful, but the operating temperature is too high for many semiconductor electronic devices to operate reliably. Micromachined Si devices can operate at these elevated temperatures. The nonlinear characteristics of the MEMS parallel plate actuator can be exploited to realize a self-oscillating resonator by placing the PPA in series with a large value resistor and a DC voltage source with a voltage greater than or equal to the pull-in voltage of the PPA. In addition to generating an oscillating proof mass motion, the voltage across the PPA also oscillates with the same fundamental frequency. This phenomenon was modelled in MATLAB Simulink and investigated experimentally.

引用

页数：7

共 42 条

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