A Nonlinear MEMS Resonator for Generating AC Voltages Without Electronics

被引：0
|
作者：
Stevens, Colin B. [1 ]
Dean, Robert N. [1 ]
Perkins, Edmon [2 ]
Li, Chong [2 ]
Beal, Aubrey N. [1 ]
Flowers, George T. [2 ]
机构：
[1] Auburn Univ, ECE Dept, Auburn, AL 36849 USA
[2] Auburn Univ, ME Dept, Auburn, AL 36849 USA
来源：
2019 IEEE SOUTHEASTCON | 2019年
关键词：
nonlinear systems; MEMS; resonator; harsh environments; PARALLEL-PLATE;
D O I：
10.1109/southeastcon42311.2019.9020649
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
High temperature applications exists where AC voltage generation would be useful, but the operating temperature is too high for many semiconductor electronic devices to operate reliably. Micromachined Si devices can operate at these elevated temperatures. The nonlinear characteristics of the MEMS parallel plate actuator can be exploited to realize a self-oscillating resonator by placing the PPA in series with a large value resistor and a DC voltage source with a voltage greater than or equal to the pull-in voltage of the PPA. In addition to generating an oscillating proof mass motion, the voltage across the PPA also oscillates with the same fundamental frequency. This phenomenon was modelled in MATLAB Simulink and investigated experimentally.
引用
收藏
页数：7
相关论文
共 42 条
  • [31] A NOVEL MODEL ORDER REDUCTION APPROACH FOR GENERATING EFFICIENT NONLINEAR VERILOG-A MODELS OF MEMS GYROSCOPES
    Parent, Arnaud
    Krust, Arnaud
    Lorenz, Gunar
    Piirainen, Tommi
    2015 2ND IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (ISISS), 2015, : 74 - 77
  • [32] Comprehensive nonlinear electromechanical analysis of nanobeams under DC/AC voltages based on consistent couple-stress theory
    Fakhrabadi, Mir Masoud Seyyed
    Yang, Jie
    COMPOSITE STRUCTURES, 2015, 132 : 1206 - 1218
  • [33] Design of a Controllable and State-observable MEMS Nonlinear Resonator Based on the Awl-shaped Serpentine Spring
    Ranjbar, Ehsan
    Suratgar, Amir Abolfazl
    2021 29TH IRANIAN CONFERENCE ON ELECTRICAL ENGINEERING (ICEE), 2021, : 78 - 84
  • [34] Sensorless Nonlinear Control of a Three-Phase/Switch/level Vienna Rectifier Based on a Numerical Reconstruction of DC and AC voltages
    Youssef, Nesrine Belhadj
    Al-Haddad, Kamal
    Kanaan, Hadi-Y.
    2008 IEEE INDUSTRY APPLICATIONS SOCIETY ANNUAL MEETING, VOLS 1-5, 2008, : 1645 - +
  • [35] Sensorless Nonlinear Control of a Three-Phase/Switch/level Vienna Rectifier Based on a Numerical Reconstruction of DC and AC voltages
    Haj, N. Bel
    Al-Haddad, K.
    2008 IEEE MEDITERRANEAN ELECTROTECHNICAL CONFERENCE, VOLS 1 AND 2, 2008, : 539 - 545
  • [36] AC Electric Powertrain without Power Electronics for Future Hybrid Electric Aircrafts: Architecture, Design and Stability Analysis
    Richard, Alexandre
    Roboam, Xavier
    Rougier, Florent
    Roux, Nicolas
    Piquet, Hubert
    APPLIED SCIENCES-BASEL, 2023, 13 (01):
  • [37] Investigation of harmonic properties of a typical nonlinear load in an AC power-electronics-based micro-grid
    Tan, Shulong
    Yang, Geng
    Geng, Hua
    Lv, Qing
    Wang, Haifeng
    2015 IEEE 2ND INTERNATIONAL FUTURE ENERGY ELECTRONICS CONFERENCE (IFEEC), 2015,
  • [38] Pulse-width modulated oscillations in a nonlinear resonator under two-tone driving as a means for MEMS sensor readout
    Houri, Samer
    Ohta, Ryuichi
    Asano, Motoki
    Blanter, Yaroslav M.
    Yamaguchi, Hiroshi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58
  • [39] A TBR-based trajectory piecewise-linear algorithm for generating accurate low-order models for nonlinear analog circuits and MEMS
    Vasilyev, D
    Rewienski, M
    White, J
    40TH DESIGN AUTOMATION CONFERENCE, PROCEEDINGS 2003, 2003, : 490 - 495
  • [40] Nonlinear-controlled strategy for soft-switched series-resonant DC/AC inverter without auxiliar switches
    Wang, CM
    IEEE TRANSACTIONS ON POWER ELECTRONICS, 2003, 18 (03) : 764 - 774
12345