The Design of a High Precision Capacitive Pressure Sensor Based on Comb Electrode

被引：0

作者：

Li, Xuejiao ^{[1
,2
]}

Zhao, Libo ^{[1
,2
]}

Han, Xiangguang ^{[1
,2
]}

Yang, Ping ^{[1
,2
]}

Luo, Guoxi ^{[1
,2
]}

Zhu, Nan ^{[1
,2
]}

Li, Zhikang ^{[1
,2
]}

Wang, Songli ^{[3
]}

Yan, Xin ^{[3
]}

Jiang, Zhuangde ^{[1
,2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Int Joint Lab Micro Nano Mfg & Measurement Techno, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Xian 710049, Peoples R China

[2] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China

[3] Flight Automat & Control Inst, Xian 710065, Peoples R China

来源：

2019 PHOTONICS & ELECTROMAGNETICS RESEARCH SYMPOSIUM - FALL (PIERS - FALL) | 2019年

基金：

中国国家自然科学基金;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

MEMS capacitive sensors promise wide applications in the field of high precision pressure sensing because of their low temperature drift, low power consumption and high precision. Based on the deformation principle of diaphragm under pressure, we present the design and fabrication process of a novel high precision MEMS capacitive pressure sensor, which consists of island-diaphragm composited structure and comb electrode. Furthermore, a finite element simulation analysis is conducted to demonstrate the excellent performance of the sensor. The simulation results show that the capacitance output non-linearity in load pressure range of 75-125 kPa and 125-200 kPa are 0.083%FS and 0.074%FS, with the sensitivities of 9.3 fF/kPa and 10.6 fF/kPa, respectively.

引用

页码：2965 / 2971

页数：7

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