Design of high precision capacitive microaccelerometer

被引：0

作者：

Chang, XQ ^{[1
]}

Ma, TH ^{[1
]}

机构：

[1] N China Univ Sci & Technol, Minist Educ, Dept Elect Engn, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Shanxi, Peoples R China

来源：

ISTM/2005: 6th International Symposium on Test and Measurement, Vols 1-9, Conference Proceedings | 2005年

关键词：

accelerometer; precision; linearity; temperature drift;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Based on the working principle of capacitive microaccelerometer, a new type capacitive microaccelerometer with high precision is designed. It consists of difference capacitor sensitivity header,following circuit, amplifier, clock circuit and V/F transform circuit. Linearity, delicacy and temperature drift of the accelerometer designed were tested by experiments. The results show that its nonlinearity error is below 0.2%FS in the temperature range from -65 degrees C to +85 degrees C. The results tally with the theoretical value and achieve the goal of improving precision.

引用

页码：5629 / 5632

页数：4

共 50 条

[1] Design and fabrication of a high-sensitive capacitive biaxial microaccelerometer
Liu, Yu
Wen, Zhiyu
Wen, Zhongquan
Zhang, Liuqiang
Yang, Hongyun
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (01) : 36 - 41
[2] Design and simulation of a capacitive biaxial microaccelerometer
Liu, Yu
Wen, Zhiyu
Chen, Li
Yang, Hongyun
[J]. MICRO-NANO TECHNOLOGY XIII, 2012, 503 : 194 - +
[3] Model of capacitive microaccelerometer
Teslyuk, Vasyl
Zaharyuk, Roman
[J]. Perspective Technologies and Methods in MEMS Design, 2006, : 86 - 86
[4] Interface Circuit for Capacitive Microaccelerometer
Liu, Minjie
Zhang, Gang
Dong, Jingxin
Zhao, Changde
[J]. 2008 51ST MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS 1 AND 2, 2008, : 654 - 657
[5] A high sensitivity capacitive microaccelerometer with a folded-electrode structure
Yazdi, N
Salian, A
Najafi, K
[J]. MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 600 - 605
[6] Design of a Piezoresistive Microaccelerometer with High Sensitivity for Medical Diagnostic
Biswas, Sonali
Gogoi, Anup Kumar
[J]. ADVANCES IN SYSTEMS, CONTROL AND AUTOMATION, 2018, 442 : 481 - 490
[7] The Design of a High Precision Capacitive Pressure Sensor Based on Comb Electrode
Li, Xuejiao
Zhao, Libo
Han, Xiangguang
Yang, Ping
Luo, Guoxi
Zhu, Nan
Li, Zhikang
Wang, Songli
Yan, Xin
Jiang, Zhuangde
[J]. 2019 PHOTONICS & ELECTROMAGNETICS RESEARCH SYMPOSIUM - FALL (PIERS - FALL), 2019, : 2965 - 2971
[8] A high-sensitivity Z-axis capacitive silicon microaccelerometer with a torsional suspension
Selvakumar, A
Najafi, K
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (02) : 192 - 200
[9] Structural Design for Microaccelerometer
Liang, Y. C.
[J]. 7TH ASIAN-PACIFIC CONFERENCE ON AEROSPACE TECHNOLOGY AND SCIENCE, APCATS 2013, 2013, 67 : 467 - 478
[10] A capacitive silicon microaccelerometer with force-balancing electrodes
Ha, B
Oh, Y
Song, C
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12B): : 7052 - 7057

← 1 2 3 4 5 →