The Design of a High Precision Capacitive Pressure Sensor Based on Comb Electrode

被引：0

作者：

Li, Xuejiao ^{[1
,2
]}

Zhao, Libo ^{[1
,2
]}

Han, Xiangguang ^{[1
,2
]}

Yang, Ping ^{[1
,2
]}

Luo, Guoxi ^{[1
,2
]}

Zhu, Nan ^{[1
,2
]}

Li, Zhikang ^{[1
,2
]}

Wang, Songli ^{[3
]}

Yan, Xin ^{[3
]}

Jiang, Zhuangde ^{[1
,2
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Int Joint Lab Micro Nano Mfg & Measurement Techno, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Xian 710049, Peoples R China

[2] Xi An Jiao Tong Univ, Sch Mech Engn, Xian 710049, Peoples R China

[3] Flight Automat & Control Inst, Xian 710065, Peoples R China

来源：

2019 PHOTONICS & ELECTROMAGNETICS RESEARCH SYMPOSIUM - FALL (PIERS - FALL) | 2019年

基金：

中国国家自然科学基金;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

MEMS capacitive sensors promise wide applications in the field of high precision pressure sensing because of their low temperature drift, low power consumption and high precision. Based on the deformation principle of diaphragm under pressure, we present the design and fabrication process of a novel high precision MEMS capacitive pressure sensor, which consists of island-diaphragm composited structure and comb electrode. Furthermore, a finite element simulation analysis is conducted to demonstrate the excellent performance of the sensor. The simulation results show that the capacitance output non-linearity in load pressure range of 75-125 kPa and 125-200 kPa are 0.083%FS and 0.074%FS, with the sensitivities of 9.3 fF/kPa and 10.6 fF/kPa, respectively.

引用

页码：2965 / 2971

页数：7

共 50 条

[21] Design and Implementation of a Planar Capacitive Pressure Sensor
Unigarro, Edgar A.
Achury, Alvaro U.
Carlos Bohorquez, Juan
Sacristan Riquelme, Jordi
Segura-Quijano, Fredy E.
[J]. 2014 IEEE 9TH IBERO-AMERICAN CONGRESS ON SENSORS (IBERSENSOR), 2014,
[22] Design study for a capacitive ceramic pressure sensor
Zarnik, Marina Santo
Belavic, Darko
Macek, Srecko
[J]. MICROELECTRONICS INTERNATIONAL, 2011, 28 (03) : 31 - 35
[23] A High-precision Detection Circuit for Capacitive Sensor
Ge, Jun
Ying, Zhihua
Pan, Ying
Qin, HuiBin
Zheng, Liang
[J]. 2015 IEEE 16TH INTERNATIONAL CONFERENCE ON COMMUNICATION TECHNOLOGY (ICCT), 2015, : 158 - 161
[24] One-Side-Electrode-Type Fluidic-Based Capacitive Pressure Sensor
Nawi, Mohd Norzaidi Mat
Abd Manaf, Asrulnizam
Abd Rahman, Mohamad Faizal
Arshad, Mohd Rizal
Sidek, Othman
[J]. IEEE SENSORS JOURNAL, 2015, 15 (03) : 1738 - 1746
[25] Stretch-insensitive capacitive pressure sensor based on highly stretchable CuNWs electrode
Yu, Shihui
Li, Junjun
Zhao, Le
Wang, Bo
Zheng, Haoran
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2022, 346
[26] High-temperature Capacitive Mode Pressure Sensor based on SiC
Yu, Hui
Lv, Hao
Song, Wei
Yang, Zhi
Pang, Ming
[J]. ADVANCED DESIGNS AND RESEARCHES FOR MANUFACTURING, PTS 1-3, 2013, 605-607 : 1440 - +
[27] Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range
Ansari H.R.
Kordrostami Z.
[J]. Energy Harvesting and Systems, 2021, 8 (02) : 81 - 85
[28] High-precision Elevation Sensor Based on Atmospheric Pressure
Gou, Jie
Zhu, Hao
Yang, Huadong
[J]. SENSORS AND MATERIALS, 2023, 35 (12) : 3985 - 3996
[29] Design of high precision pressure-resistance type pressure sensor detecting system
Zhao, Xueliang
Gao, Shuren
Wang, Tao
Guo, Yingping
[J]. PROCEEDINGS OF THE 2016 INTERNATIONAL CONFERENCE ON INNOVATIVE MATERIAL SCIENCE AND TECHNOLOGY (IMST 2016), 2016, 139 : 198 - 203
[30] Design of MEMS based Capacitive Pressure Sensor to Monitor the Respiratory Conditions of Patients
Shameem, Syed
Suresh, Namgiri
Kasmira, K.
Yeswanth, P.
Naveen, B.
Vineetha, K. V.
[J]. 2019 4TH INTERNATIONAL CONFERENCE ON ELECTRICAL, ELECTRONICS, COMMUNICATION, COMPUTER TECHNOLOGIES AND OPTIMIZATION TECHNIQUES (ICEECCOT), 2019, : 259 - 264

← 1 2 3 4 5 →