Structural characterization of lamellar multilayer gratings by x-ray reflectivity and scanning electron microscopy

被引：14

作者：

Jergel, M

Mikulík, P

Majková, E

Luby, S

Senderák, R

Pincík, E

Brunel, M

Hudek, P

Kostic, I

Konecníková, A

机构：

[1] Slovak Acad Sci, Inst Phys, Bratislava 84228, Slovakia

[2] Masaryk Univ, Fac Sci, Lab Thin Films & Nanostruct, CS-61137 Brno, Czech Republic

[3] Slovak Acad Sci, Inst Comp Syst, Bratislava 84237, Slovakia

[4] CNRS, Cristallog Lab, F-38042 Grenoble 09, France

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1999年 / 32卷 / 10A期

关键词：

D O I：

10.1088/0022-3727/32/10A/343

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Structural characterization of a fully etched amorphous W/Si multilayer grating with lateral periodicity 800 nm is performed by x-ray reflectivity. Grating truncation rod profiles have been calculated using a matrix modal eigenvalue approach of the dynamical theory of reflectivity by gratings which generalizes the Fresnel transmission and reflection coefficients for lateral diffraction. The interface roughness in rough gratings has been taken into account by a coherent amplitude approach which damps the generalized Fresnel coefficients. Scanning electron microscopy pictures complete the study.

引用

页码：A220 / A223

页数：4

共 50 条

[31] X-ray diffraction and scanning electron microscopy of concrete composites of high structural strength and density
Sumariuk, O.
Fodchuk, I
Roman, Yu
Hutsuliak, I
Romankevich, V
FIFTEENTH INTERNATIONAL CONFERENCE ON CORRELATION OPTICS, 2021, 12126
[32] Characterization of electrodeposited calcium phosphate coatings by complementary scanning electron microscopy and scanning-transmission electron microscopy associated to X-ray microanalysis
Dumelié, N
Benhayoune , H
Rousse-Bertrand, C
Bouthors, S
Perchet, A
Wortham, L
Douglade, J
Laurent-Maquin, D
Balossier, G
THIN SOLID FILMS, 2005, 492 (1-2) : 131 - 139
[33] X-ray reflectivity study of Nb/Si multilayer
Suresh, N
Phase, DM
Gupta, A
Chaudhari, SM
X-RAY SPECTROSCOPY AND ALLIED AREAS, 1998, : 96 - 99
[34] X-ray reflectivity of multilayer mirrors for the water window
Grimmer, H
Boni, P
Breitmeier, U
Clemens, D
Horisberger, M
Mertins, HC
Schafers, F
THIN SOLID FILMS, 1998, 319 (1-2) : 73 - 77
[35] Study of thin film multilayers using X-ray reflectivity and scanning probe microscopy
Banerjee, S
Datta, A
Sanyal, MK
VACUUM, 2001, 60 (04) : 371 - 376
[36] Soft X-ray characterization of halide perovskite film by scanning transmission X-ray microscopy
Haeyeon Jun
Hee Ryung Lee
Denis Tondelier
Bernard Geffroy
Philip Schulz
Jean-Éric Bourée
Yvan Bonnassieux
Sufal Swaraj
Scientific Reports, 12
[37] Soft X-ray characterization of halide perovskite film by scanning transmission X-ray microscopy
Jun, Haeyeon
Lee, Hee Ryung
Tondelier, Denis
Geffroy, Bernard
Schulz, Philip
Bouree, Jean-Eric
Bonnassieux, Yvan
Swaraj, Sufal
SCIENTIFIC REPORTS, 2022, 12 (01)
[38] Study of the structural quality of heteroepitaxial silicon-on-sapphire structures by high-resolution X-ray diffraction, X-ray reflectivity, and electron microscopy
A. E. Blagov
A. L. Vasiliev
A. S. Golubeva
I. A. Ivanov
O. A. Kondratev
Yu. V. Pisarevsky
M. Yu. Presnyakov
P. A. Prosekov
A. Yu. Seregin
Crystallography Reports, 2014, 59 : 315 - 322
[39] Study of the structural quality of heteroepitaxial silicon-on-sapphire structures by high-resolution X-ray diffraction, X-ray reflectivity, and electron microscopy
Blagov, A. E.
Vasiliev, A. L.
Golubeva, A. S.
Ivanov, I. A.
Kondratev, O. A.
Pisarevsky, Yu. V.
Presnyakov, M. Yu.
Prosekov, P. A.
Seregin, A. Yu.
CRYSTALLOGRAPHY REPORTS, 2014, 59 (03) : 315 - 322
[40] Complex Aerosol Characterization by Scanning Electron Microscopy Coupled with Energy Dispersive X-ray Spectroscopy
Brostrom, Anders
Kling, Kirsten I.
Hougaard, Karin S.
Molhave, Kristian
SCIENTIFIC REPORTS, 2020, 10 (01)

← 1 2 3 4 5 →