Review of Fabrication Methods of Nanotube/Nanowire Devices

被引：1
|
作者：
Tan, Miaomiao [1 ]
Zhang, Ziyi [1 ]
Zhao, Linhui [1 ]
Zhang, Jiancheng [1 ]
机构：
[1] Beijing Union Univ, Beijing, Peoples R China
来源：
PRECISION ENGINEERING AND NON-TRADITIONAL MACHINING | 2012年 / 411卷
关键词：
Nanoelectromechanical system (NEMS); Carbon nanotube (CNT); Assembly; WALL CARBON NANOTUBES; SURFACES; MANIPULATION; FIELD; FLOW;
D O I：
10.4028/www.scientific.net/AMR.411.427
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
With the development of nano materials, a novel research field of NEMS forms by combining nano materials, nano-structures and nano fabrication with MEMS. Carbon nanotube (CNT) is a kind of one-dimensional nano structures which has unique mechanical, electrical and chemical properties. Using CNTs, new nano-devices with new principle or high performance would be developed. This paper reviews the assembly methods of one dimensional nanostructure and analyzes the characteristics of various methods, which provides reference for the device manufacturing methods using nanotubes/nanowires.
引用
收藏
页码：427 / 431
页数：5
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