Novel Fabrication Technique of Suspended Nanowire Devices for Nanomechanical Applications

被引：0
|
作者：
Tomita, Wataru [1 ,2 ]
Sasaki, Satoshi [1 ]
Tateno, Kouta [1 ]
Okamoto, Hajime [1 ]
Yamaguchi, Hiroshi [1 ,2 ]
机构：
[1] NIT Corp, Basic Res Labs, Tokyo, Japan
[2] Tohoku Univ, Dept Phys, Sendai, Miyagi, Japan
来源：
2019 COMPOUND SEMICONDUCTOR WEEK (CSW) | 2019年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：1
相关论文
共 50 条
  • [1] Novel Fabrication Technique of Suspended Nanowire Devices for Nanomechanical Applications
    Tomita, Wataru
    Sasaki, Satoshi
    Tateno, Kouta
    Okamoto, Hajime
    Yamaguchi, Hiroshi
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2020, 257 (02):
  • [2] FABRICATION AND MEASUREMENT OF SUSPENDED SILICON CARBIDE NANOWIRE DEVICES AND DEFLECTION
    Jung, Inhwa
    Chung, Jae-Hyun
    Piner, Richard
    Suk, Ji Won
    Ruoff, Rodney S.
    NANO, 2009, 4 (06) : 351 - 358
  • [3] A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications
    Mai, Linh
    Lee, Jae-Young
    Pharn, Van-Su
    Yoon, Giwan
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2008, 50 (02) : 375 - 378
  • [4] A novel interconnection technique for manufacturing nanowire devices
    Islam, MS
    Sharma, S
    Kamins, TI
    Williams, RS
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (06): : 1133 - 1140
  • [5] A novel interconnection technique for manufacturing nanowire devices
    M. Saif Islam
    S. Sharma
    T.I. Kamins
    R. Stanley Williams
    Applied Physics A, 2005, 80 : 1133 - 1140
  • [6] Fabrication of suspended silicon nanowire arrays
    Lee, Kook-Nyung
    Jung, Suk-Won
    Shin, Kyu-Sik
    Kim, Won-Hyo
    Lee, Min-Ho
    Seong, Woo-Kyeong
    SMALL, 2008, 4 (05) : 642 - 648
  • [7] Horizontally patterned Si nanowire growth for nanomechanical devices
    Fernandez-Regulez, M.
    Sansa, M.
    Serra-Garcia, M.
    Gil-Santos, E.
    Tamayo, J.
    Perez-Murano, F.
    Paulo, A. San
    NANOTECHNOLOGY, 2013, 24 (09)
  • [8] THE FABRICATION OF SUSPENDED MICROSTRUCTURES FOR DEVICES
    MOORE, DF
    LUTWYCHE, MI
    FUJIMAKI, N
    GOTOH, K
    SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1991, 4 (09): : 401 - 405
  • [9] Fabrication approaches to ZnO nanowire devices
    J. R. LaRoche
    Y. W. Heo
    B. S. Kang
    L. C. Tien
    Y. Kwon
    D. P. Norton
    B. P. Gila
    F. Ren
    S. J. Pearton
    Journal of Electronic Materials, 2005, 34 : 404 - 408
  • [10] Fabrication approaches to ZnO nanowire devices
    LaRoche, JR
    Heo, YW
    Kang, BS
    Tien, LC
    Kwon, Y
    Norton, DP
    Gila, BP
    Ren, F
    Pearton, SJ
    JOURNAL OF ELECTRONIC MATERIALS, 2005, 34 (04) : 404 - 408
12345