Influence of atomic force microscopy acquisition parameters on thin film roughness analysis

被引：9

作者：

Hristu, Radu ^{[1
]}

Stanciu, Stefan G. ^{[1
]}

Stanciu, George A. ^{[1
]}

Capan, Inci ^{[2
]}

Guner, Burcu ^{[2
]}

Erdogan, Matem ^{[2
]}

机构：

[1] Univ Politehn Bucuresti, Ctr Microscopy Microanal & Informat Proc, Bucharest 060042, Romania

[2] Balikesir Univ, Sci & Arts Fac, Dept Phys, TR-10100 Balikesir, Turkey

来源：

MICROSCOPY RESEARCH AND TECHNIQUE | 2012年 / 75卷 / 07期

关键词：

gas sensing properties; scanning probe microscopy; surface roughness; porphyrin thin films; GAS-SENSING PROPERTIES; LB FILMS; PORPHYRIN; LANGMUIR; SURFACE; OPTIMIZATION; DERIVATIVES;

D O I：

10.1002/jemt.22014

中图分类号：

R602 [外科病理学、解剖学]; R32 [人体形态学];

学科分类号：

100101 ;

摘要：

A reliable procedure for measuring parameters connected to surface roughness is needed to compare the gas sensing properties of various thin films or the effect of different fabrication procedures on the surface roughness and the sensing properties. In this article, we propose to investigate how the acquisition parameters specific to atomic force microscopy investigations such as pixel size, scan area and scan speed influence the roughness parameters, namely root mean square and surface area ratio, commonly used for characterizing the gas sensing properties of porphyrins and other materials. Microsc. Res. Tech. 2012. (C) 2012 Wiley Periodicals, Inc.

引用

页码：921 / 927

页数：7

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