Highly Sensitive Flexible Pressure Sensor with Microstructural Dielectric Layer

Flexible pressure sensors have attracted increasing attention recently because of their high sensitive, flexible and widely applications in wearable electronics. In this paper, a flexible pressure sensor based on parallel plate capacitor mold was prepared. The high sensitivity of the prepared pressure sensor is achieves by fabricating the microstructural dielectric layer of polydimethylsiloxane (PDMS), which is more compressible compared to that of non-microstructural PDMS. The fabricating process of the microstructural dielectric, the effects of the microstructures, elastic modulus and thickness of the dielectric layer on the sensitivities of the flexible pressure sensor are investigating. The optimizing sensor exhibits high sensitivity of 1.284 kPa(-1), relatively low detection limits of 50 mg and superior physical robustness. The prepared flexible pressure sensor has the potential applications into the wearable electronics and health monitor devices such as breath, heartbeat and blood pressure detections.