Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures

被引:4
|
作者
Yan, Yu-Chao [1 ]
Jiang, Cheng-Yu [1 ]
Chen, Run-Bo [1 ]
Ma, Bing-He [1 ]
Deng, Jin-Jun [1 ]
Zheng, Shao-Jun [1 ]
Luo, Jian [1 ]
机构
[1] Northwestern Polytech Univ, Key Lab Micro Nano Syst Aerosp, Minist Educ, Xian 710072, Peoples R China
基金
中国国家自然科学基金;
关键词
dual-layer structure; hot film; heat conduction insulation; flow shear stress; PRESSURE; ARRAY;
D O I
10.3390/s20226657
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Hot film sensors detect the flow shear stress based on the forced convection heat transfer to the fluid. Current hot film sensors have been significantly hindered by the relatively low sensitivity due to the massive heat conduction to the substrate. This paper describes the design, fabrication, simulation, and testing of a novel flow sensor with dual-layer hot film structures. More specifically, the heat conduction was insulated from the sensing heater to the substrate by controlling both sensing and guarding heaters working at the same temperature, resulting in a higher sensitivity. The experiment and simulation results showed that the sensitivity of the dual-layer hot film sensor was significantly improved in comparison to the single-layer sensor. Additionally, the dual-layer sensor was designed and fabricated in an integrated, flexible, and miniaturized manner. Its small size makes it an excellent candidate for flow detection.
引用
收藏
页码:1 / 9
页数:9
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