Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system

被引：0
|
作者：
Lincoln, I [1 ]
Howland, RS [1 ]
Wells, K [1 ]
机构：
[1] TENCOR INSTRUMENTS,WAFER INSPECT DIV,MT VIEW,CA 94043
来源：
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY X | 1996年 / 2725卷
关键词：
D O I：
10.1117/12.240123
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：742 / 745
页数：4
相关论文
共 50 条
  • [21] Laser-based defect localization on integrated circuits
    Cole, Edward I., Jr.
    2006 INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2, 2006, : 784 - 787
  • [22] Industrial applications of laser-based profilometry
    Doyle, JL
    Correa, MA
    Bondurant, PD
    REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOLS 15A AND 15B, 1996, 15 : 2211 - 2217
  • [23] Laser-based ultrasonics for QNDE applications
    Fomitchov, P
    Wang, LS
    Steckenrider, JS
    Krishnaswamy, S
    Achenbach, JD
    INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS: ADVANCES AND APPLICATIONS, 1997, 2921 : 166 - 176
  • [24] Laser-based ultrasonics: Applications at APL
    Blodgett, DW
    Baldwin, KC
    JOHNS HOPKINS APL TECHNICAL DIGEST, 2005, 26 (01): : 36 - 45
  • [25] Laser-based communication system
    Allison, James M., 1600, (32):
  • [26] Laser-based ultrasonics for QNDE applications
    Achenbach, JD
    9TH INTERNATIONAL CONFERENCE ON PHOTOACOUSTIC AND PHOTOTHERMAL PHENOMENA, CONFERENCE DIGEST, 1996, : 403 - 404
  • [27] Imaging and Metrology of Silicon Carbide Wafers by Laser-based Optical Surface Inspection System
    Hatakeyama, T.
    Ichinoseki, K.
    Higuchi, N.
    Fukuda, K.
    Arai, K.
    SILICON CARBIDE AND RELATED MATERIALS 2007, PTS 1 AND 2, 2009, 600-603 : 553 - +
  • [28] Laser-based measurement system
    不详
    OPTICS AND LASER TECHNOLOGY, 1997, 29 (01): : R8 - R8
  • [29] DEVELOPMENT OF A NEW LASER-BASED, OPTICAL INDOOR POSITIONING SYSTEM
    Tilch, S.
    Mautz, R.
    PROCEEDINGS OF THE ISPRS COMMISSION V MID-TERM SYMPOSIUM CLOSE RANGE IMAGE MEASUREMENT TECHNIQUES, 2010, 38 : 575 - 580
  • [30] A new laser-based sensing system for monitoring and control of webs
    Abbaraju, A. K.
    Peddi-Ravi, P. K.
    Seshadri, A.
    Pagilla, P. R.
    SMART STRUCTURES AND MATERIALS 2006: SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL , AND AEROSPACE SYSTEMS, PTS 1 AND 2, 2006, 6174
12345