Synthesis of vertically aligned carbon nanofibers using inductively coupled plasma-enhanced chemical vapor deposition

被引:17
|
作者
Shoukat, Rizwan [1 ]
Khan, Muhammad Imran [2 ,3 ]
机构
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, D-79110 Freiburg, Germany
[2] UET, Dept Elect Engn, Taxila 47050, Pakistan
[3] USTC, Micronano Elect Syst Integrat R&D Ctr MESIC, Hefei 230027, Anhui, Peoples R China
关键词
Carbon nanofibers; RF plasma; Glow discharge; Catalyst; Nanotechnology; NANOTUBES; GROWTH; FIELD;
D O I
10.1007/s00202-017-0561-z
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This journal paper reports a highly reliable and efficient method for the growth of vertically aligned carbon nanofibers. The inductively coupled plasma-enhanced chemical vapor deposition method utilizes a low substrate temperature (approx. 650 degrees C) for the growth purpose using toluene as carbon source. Carbon nanofibers are characterized using SEM (scanning electron microscopy), EDX (energy-dispersive X-ray) and Raman spectroscopy. Uniform carbon nanofibers are grown on different substrates. The results further show that the use of catalyst is not mandatory to grow the carbon nanofibers.
引用
收藏
页码:997 / 1002
页数:6
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