XPS Analysis of ZnO thin Films Obtained by Pulsed Laser Deposition

被引：17
|
作者：
He, Jianting [1 ]
Tan, Boxue [1 ]
Su, Yuanbin [1 ]
Yang, Shulian [1 ]
Wei, Qinqin [1 ]
机构：
[1] Shandong Univ Technol Zibo, Sch Elect & Elect Engn, Zibo, Peoples R China
来源：
MANUFACTURING SCIENCE AND TECHNOLOGY, PTS 1-8 | 2012年 / 383-390卷
关键词：
XPS; ZnO; pulsed laser deposition; oxygen partial pressure; TEMPERATURE;
D O I：
10.4028/www.scientific.net/AMR.383-390.6293
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
Highly c-axis oriented ZnO thin films were deposited on n-Si (111) substrate at various oxygen partial pressures by pulsed laser deposition (PLD). X-ray diffraction (XRD), Atomic force microscopy (AFM) were used to analyze the influence of the oxygen partial pressure on the crystallization and morphology of the ZnO thin films. X-ray photoelectron spectroscopy (XPS) was used to analyze relationships between chemical shifts of XPS energy spectra and stoichiometric ratios of ZnO thin films, and quantitative relationships between content of Zn, O and oxygen partial pressures. An optimal crystallized and stoichiometric ZnO thin film was observed at the oxygen partial pressure of 6.5Pa.
引用
收藏
页码：6293 / 6296
页数：4
相关论文
共 50 条
  • [21] Epitaxial piezoelectric PZT thin films obtained by pulsed laser deposition
    Verardi, P
    Craciun, F
    Dinescu, M
    Gerardi, C
    THIN SOLID FILMS, 1998, 318 (1-2) : 265 - 269
  • [22] Processing and characterization of ferroelectric thin films obtained by pulsed laser deposition
    Craciun, F
    Dinescu, M
    Verardi, P
    Scarisoreanu, N
    Moldovan, A
    Purice, A
    Galassi, C
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2005, 25 (12) : 2299 - 2303
  • [23] Synthesis and characterization of PLZT thin films obtained by pulsed laser deposition
    Verardi, P
    Craciun, F
    Scarisoreanu, N
    Epurescu, G
    Dinescu, M
    Vrejoiu, I
    Dauscher, A
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6): : 1283 - 1285
  • [24] THEED study of CrTe thin films obtained by pulsed laser deposition
    Sagan, Piotr
    Kuzma, Marian
    ELECTRON MICROSCOPY XIV, 2012, 186 : 172 - 176
  • [25] Thin films of advanced oxidic materials obtained by pulsed laser deposition
    Vasiliu, C.
    Epurescu, G.
    Grigorescu, C.
    Elisa, M.
    Pavelescu, G.
    Purice, A.
    Moldovan, A.
    Dinescu, M.
    APPLIED SURFACE SCIENCE, 2007, 253 (19) : 8278 - 8281
  • [26] Bioactive glass and hydroxyapatite thin films obtained by pulsed laser deposition
    Gyorgy, E.
    Grigorescu, S.
    Socoi, G.
    Mifilailescu, I. N.
    Janackovic, D.
    Dindune, A.
    Kanepe, Z.
    PalcevskiSe, E.
    Zdrentu, E. L.
    Petrescu, S. M.
    APPLIED SURFACE SCIENCE, 2007, 253 (19) : 7981 - 7986
  • [27] Synthesis and characterization of PLZT thin films obtained by pulsed laser deposition
    P. Verardi
    F. Craciun
    N. Scarisoreanu
    G. Epurescu
    M. Dinescu
    I. Vrejoiu
    A. Dauscher
    Applied Physics A, 2004, 79 : 1283 - 1285
  • [28] Modelling of growth of thin solid films obtained by pulsed laser deposition
    Kuzma, M
    Bester, M
    Pyziak, L
    Stefaniuk, I
    Virt, I
    APPLIED SURFACE SCIENCE, 2000, 168 (1-4) : 132 - 135
  • [29] Novel doped hydroxyapatite thin films obtained by pulsed laser deposition
    Duta, L.
    Oktar, F. N.
    Stan, G. E.
    Popescu-Pelin, G.
    Serban, N.
    Luculescu, C.
    Mihailescu, I. N.
    APPLIED SURFACE SCIENCE, 2013, 265 : 41 - 49
  • [30] Dense and porous ZnO thin films produced by pulsed laser deposition
    Sun, YW
    Gospodyn, J
    Kursa, P
    Sit, J
    DeCorby, RG
    Tsui, YY
    APPLIED SURFACE SCIENCE, 2005, 248 (1-4) : 392 - 396
12345