Nanoscale experimental study of the morphology of a microcrack in silicon by transmission electron microscopy

被引:0
|
作者
Liu, D. S. [1 ,2 ]
Zhao, C. W. [2 ]
Hou, X. H. [3 ]
机构
[1] Qiqihar Univ, Commun & Elect Engn Inst, Qiqihar 161006, Peoples R China
[2] Inner Mongolia Univ Technol, Coll Sci, Hohhot 010051, Peoples R China
[3] Inner Mongolia Univ Technol, Test Ctr, Hohhot 010051, Peoples R China
来源
PRAMANA-JOURNAL OF PHYSICS | 2013年 / 80卷 / 05期
基金
中国国家自然科学基金;
关键词
Microcrack; high-resolution transmission electron microscopy; numerical Moire; cleavage plane; CRACK-TIP FIELDS; QUANTITATIVE MEASUREMENT; MOIRE METHOD; STRAIN FIELDS; DISPLACEMENT; DEFORMATION; CRYSTALS; COPPER;
D O I
10.1007/s12043-013-0528-1
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A microcrack in a silicon single crystal was experimentally investigated using high-resolution transmission electron microscopy (HRTEM). In particular, the numerical Moir, (NM) method was used to visualize the deformations and defects. The lattice structure of the microcrack was carefully observed at the nanoscale. HRTEM images of the microcrack demonstrated that the lattice structure of most of the microcrack regions is regular with good periodicity. In addition, the microcrack cleavage expands alternately along different crystal planes, where the principal cleavage plane is the (1 1 1) crystal plane. The NM maps showed no sharp plastic deformation around the microcrack, but discrete edge dislocations can be found only near the crack tip.
引用
收藏
页码:903 / 907
页数:5
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