Fabrication of a 94 GHz LIGA klystrino

被引：0

作者：

Cheng, Y ^{[1
]}

Scheitrum, G ^{[1
]}

Garyotakis, G ^{[1
]}

Hasse, A ^{[1
]}

Song, L ^{[1
]}

Arfin, B ^{[1
]}

James, B ^{[1
]}

机构：

[1] Synchrotron Radiat Res Ctr, Hsinchu 300, Taiwan

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

UD LIGA; millimeter wave; klystrino;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

The klystrino developed at Stanford Linear Accelerator Center (SLAC) is a microfabricated klystron being the high-power source of microwaves [1]. The ultra-deep (UD) LIGA process is adopted to fabricate the millimeter cavities of this reported W-band (94 GHz) klystrino. The design addresses multiple applications in accelerators, radars, and communications. The goal of the program is to produce a 100 KW peak, 1 KW average power modular klystrino in a small package. Figure 1 shows an example of four klystrino module that should produce 400 KW peak power and 4 KW average power in a 4 " x 4 " x 14 " package with a weight of 2.4 lbs.

引用

页码：1532 / 1535

页数：4

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