Fabrication of a 94 GHz LIGA klystrino

被引：0

作者：

Cheng, Y ^{[1
]}

Scheitrum, G ^{[1
]}

Garyotakis, G ^{[1
]}

Hasse, A ^{[1
]}

Song, L ^{[1
]}

Arfin, B ^{[1
]}

James, B ^{[1
]}

机构：

[1] Synchrotron Radiat Res Ctr, Hsinchu 300, Taiwan

来源：

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年

关键词：

UD LIGA; millimeter wave; klystrino;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

The klystrino developed at Stanford Linear Accelerator Center (SLAC) is a microfabricated klystron being the high-power source of microwaves [1]. The ultra-deep (UD) LIGA process is adopted to fabricate the millimeter cavities of this reported W-band (94 GHz) klystrino. The design addresses multiple applications in accelerators, radars, and communications. The goal of the program is to produce a 100 KW peak, 1 KW average power modular klystrino in a small package. Figure 1 shows an example of four klystrino module that should produce 400 KW peak power and 4 KW average power in a 4 " x 4 " x 14 " package with a weight of 2.4 lbs.

引用

页码：1532 / 1535

页数：4

共 50 条

[21] SCALING OF 85 GHZ GYROTRON TO OPERATE AT 94 GHZ
BERGERON, G
CZARNASKI, M
RHINEWINE, M
INTERNATIONAL JOURNAL OF ELECTRONICS, 1990, 69 (02) : 281 - 290
[22] Fabrication of LIGA Masks for Microfluidic Analytical Systems
Goldenberg, B. G.
Goryachkovskaya, T. N.
Eliseev, V. S.
Kolchanov, N. A.
Kondrat'ev, V. I.
Kulipanov, G. N.
Popik, V. M.
Pel'tek, S. E.
Petrova, E. V.
Pindyurin, V. F.
JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, 2008, 2 (04) : 637 - 640
[23] FABRICATION OF CAPACITIVE ACCELERATION SENSORS BY THE LIGA TECHNIQUE
BURBAUM, C
MOHR, J
BLEY, P
EHRFELD, W
SENSORS AND ACTUATORS A-PHYSICAL, 1991, 27 (1-3) : 559 - 563
[24] Fabrication of LIGA masks for microfluidic analytical systems
B. G. Goldenberg
T. N. Goryachkovskaya
V. S. Eliseev
N. A. Kolchanov
V. I. Kondrat’ev
G. N. Kulipanov
V. M. Popik
S. E. Pel’tek
E. V. Petrova
V. F. Pindyurin
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 2008, 2 : 637 - 640
[25] Transport limitations in electrodeposition for LIGA microdevice fabrication
Griffiths, SK
Nilson, RH
Bradshaw, RW
Ting, A
Bonivert, WD
Hachman, JT
Hruby, JM
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IV, 1998, 3511 : 364 - 375
[26] Ensuring repeatability in LIGA mold insert fabrication
J. Schulz
K. Bade
M. Guttmann
L. Hahn
A. Janssen
U. Köhler
P. Meyer
F. Winkler
Microsystem Technologies, 2004, 10 (5) : 419 - 422
[27] Design and fabrication of a liquid crystal-based 94 GHz 360◦ phase shifter for reflectarray antennas
Mao R.
Xu J.
Li X.
Sun S.
Li X.
Yang J.
Yin Z.
Deng G.
Lu H.
Progress in Electromagnetics Research Letters, 2021, 100 : 145 - 150
[28] 94GHz Fabrication of a Slotted Waveguide Array Antenna by Diffusion Bonding of Laminated Thin Plates
Hirokawa, Jiro
Zhang, Miao
Ando, Makoto
2009 IEEE SENSORS, VOLS 1-3, 2009, : 907 - 911
[29] Design, fabrication and measurement of a novel 140 GHz folded waveguide based on SU-8 UV-LIGA technology
Xie, Fuqiang
Ding, Guifu
Zhao, Xiaolin
Cheng, Ping
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (08)
[30] 35 Ghz and 94 Ghz microwave absorption in the primate eye
Chalfin, S
D'Andrea, JA
Comeau, PD
Belt, ME
Hatcher, DJ
INVESTIGATIVE OPHTHALMOLOGY & VISUAL SCIENCE, 1999, 40 (04) : S447 - S447

← 1 2 3 4 5 →