Fabrication of a 94 GHz LIGA klystrino

The klystrino developed at Stanford Linear Accelerator Center (SLAC) is a microfabricated klystron being the high-power source of microwaves [1]. The ultra-deep (UD) LIGA process is adopted to fabricate the millimeter cavities of this reported W-band (94 GHz) klystrino. The design addresses multiple applications in accelerators, radars, and communications. The goal of the program is to produce a 100 KW peak, 1 KW average power modular klystrino in a small package. Figure 1 shows an example of four klystrino module that should produce 400 KW peak power and 4 KW average power in a 4 " x 4 " x 14 " package with a weight of 2.4 lbs.