Multilayer structure;
Magnetic materials;
Magnetic anisotropy;
High-frequency characteristics;
Sputtering;
SOFT-MAGNETIC PROPERTIES;
FREQUENCY PERMEABILITY;
D O I:
10.1016/j.matlet.2012.11.015
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Thin film materials with excellent high-frequency, magnetic and electrical properties are in great demand in modern electromagnetic devices operating in GHz range. In this letter, we fabricated [Fe80Ni20-O/SiO2](n) multilayer thin films with different SiO2 interlayer thicknesses (t=0.5-4 nm) and fixed Fe80Ni20-O layer thickness by controlling the sputtering time at room temperature. In these films, the in-plane uniaxial magnetic anisotropy fields can be adjusted in a broad range (from 26 to 107 Oe) by just changing the thickness of each SiO2 interlayer without applying any inducing field. Excellent high-frequency performances in GHz range have been observed in the typical sample. (C) 2012 Elsevier B.V. All rights reserved.