A multiple target system using laser ablation for multilayer deposition

被引：5
|
作者：
Campion, RP
Dye, DR
King, PJ
Ormson, RG
机构：
[1] Department of Physics, University of Nottingham
来源：
VACUUM | 1996年 / 47卷 / 01期
基金：
英国工程与自然科学研究理事会;
关键词：
D O I：
10.1016/0042-207X(95)00212-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The laser ablation technique requires the laser spot to be scanned across the surface of a target, while the fabrication of multi-layer thin film devices by laser deposition requires the in-situ selection of a number of different targets. The design and construction of a multiple target system for use under vacuum or in oxygen is described. The system uses a single drive both to select targets and to scan across their complete surfaces, and so eliminates the need for beam rastering or two drive mechanisms.
引用
收藏
页码：1 / 3
页数：3
相关论文
共 50 条
  • [31] AlN thin films deposition by laser ablation of Al target in nitrogen reactive atmosphere
    Verardi, P.
    Dinescu, M.
    Gerardi, C.
    Mirenghi, L.
    Sandu, V.
    Applied Surface Science, 1997, 109-110 : 371 - 375
  • [32] Deposition of cubic GaN films by reactive laser ablation of liquid Ga target in ammonia
    Lee, IH
    Park, SM
    BULLETIN OF THE KOREAN CHEMICAL SOCIETY, 2000, 21 (11) : 1065 - 1066
  • [33] TARGET ABLATION CHARACTERISTICS DURING PULSED-LASER DEPOSITION OF THIN-FILMS
    SINGH, RK
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1994, 178 : 199 - 209
  • [34] Multilayer deposition and nanostructuring by laser methods
    Gorbunov, AA
    Pompe, W
    Sewing, A
    Akhsakhalyan, AD
    Gaponov, SV
    Salaschenko, NN
    Dietsch, R
    Mai, H
    Vollmar, S
    ALT '95 INTERNATIONAL SYMPOSIUM ON ADVANCED MATERIALS FOR OPTICS AND OPTOELECTRONICS, 1996, 2777 : 107 - 118
  • [35] AlN thin films deposition by laser ablation of Al target in nitrogen reactive atmosphere
    Verardi, P
    Dinescu, M
    Gerardi, C
    Mirenghi, L
    Sandu, V
    APPLIED SURFACE SCIENCE, 1997, 109 : 371 - 375
  • [36] Deposition of silicon nitride films by pulsed laser ablation of the Si target in nitrogen gas
    Umezu, I
    Kohno, K
    Yamaguchi, T
    Sugimura, A
    Inada, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (01): : 30 - 32
  • [37] Multipurpose high vacuum laser ablation/thin film deposition system
    Gomlak, G
    Kelly, MC
    Panayotov, VG
    Koplitz, B
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (09): : 3701 - 3706
  • [38] Using of laser ablation to fabrication nanocrystalline multilayer coatings for biomedical and tribological application
    Major, Boguslaw
    Major, Roman
    Lackner, Juergen M.
    Waldhauser, Wolfgang
    LASER TECHNOLOGY VIII: APPLICATIONS OF LASERS, 2007, 6598
  • [39] Effects of Laser Ablation on Growth of ZnO/ZnS/ZnO Multilayer Structured Nanorods by Chemical Vapor Deposition
    Hirate, Takashi
    Koisikawa, Hiroaki
    Yugi, Makoto
    Kumada, Takuya
    Matsuzawa, Yuki
    Satoh, Tomomasa
    NANOWIRES - SYNTHESIS, PROPERTIES, ASSEMBLY AND APPLICATIONS, 2009, 1144 : 85 - +
  • [40] Pulsed laser deposition of silicon nitride thin films by laser ablation of a Si target in low pressure ammonia
    Mihailescu, IN
    Lita, A
    Teodorescu, VS
    Luches, A
    Martino, M
    Perrone, A
    Gartner, M
    JOURNAL OF MATERIALS SCIENCE, 1996, 31 (11) : 2839 - 2847
12345