A multiple target system using laser ablation for multilayer deposition

The laser ablation technique requires the laser spot to be scanned across the surface of a target, while the fabrication of multi-layer thin film devices by laser deposition requires the in-situ selection of a number of different targets. The design and construction of a multiple target system for use under vacuum or in oxygen is described. The system uses a single drive both to select targets and to scan across their complete surfaces, and so eliminates the need for beam rastering or two drive mechanisms.