Opto-mechanical integrated analysis for optical system

High performance optical systems require integrated opto-mechanical analysis to predict performance. But, output from mechanical analysis cannot be used directly by optical simulation. This paper outlines the transmission method of mechanical analysis result to optical program. Zernike polynomials have corresponding meanings of Seidel aberrations and can be accepted by optical program, are used as tool to solve the data transmission problem among optical, mechanical and thermal program. Here, Thermal/Structural/Optical (TSO) integrated process; Zernike polynomials and its fitting method, fitting process are introduced.