Design and Control of a Decoupled Micro-positioning Stage Using Corrugated Flexure Units

被引：0
|
作者：
Wang, Nianfeng [1 ]
Liang, Xiaohe [1 ]
Zhang, Zhiyuan [1 ]
Li, Canran [1 ]
Zhang, Xianmin [1 ]
Yang, Lei [2 ]
机构：
[1] South China Univ Technol, Dept Mechatron Engn, Guangzhou 510640, Guangdong, Peoples R China
[2] Shenzhen Inovance Technol Co Ltd, Shenzhen, Peoples R China
来源：
2019 9TH IEEE ANNUAL INTERNATIONAL CONFERENCE ON CYBER TECHNOLOGY IN AUTOMATION, CONTROL, AND INTELLIGENT SYSTEMS (IEEE-CYBER 2019) | 2019年
基金：
中国国家自然科学基金;
关键词：
POSITIONING STAGE;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
An XY decoupled micro-positioning stage is designed which is constructed with eight pieces of corrugated flexure (CF) beams. The stage is actuated by noncontact force provided by electromagnetic actuators. Staircase signal is applied to eliminate the residual vibration. A polynomial is used to represent the nonlinear characteristic of the experimental system accurately, and the feedforward voltage compensation strategy is adopted to reduce the negative effect caused by hysteresis loop. A prototype has been built and experiments are set up to test the design and analysis. The results show that the moving range can achieve +/- 700 mu m and the relative errors between theoretical and experimental values are within 4%.
引用
收藏
页码：1038 / 1043
页数：6
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