Direct measurement of the linewidth of relief element on AFM in nanometer range

被引：0

作者：

Novikov, Yu. A. ^{[1
]}

Filippov, M. N. ^{[2
]}

Lysov, I. D. ^{[3
]}

Rakov, A. V. ^{[1
]}

Sharonov, V. A. ^{[3
]}

Todua, P. A. ^{[4
]}

机构：

[1] Russian Acad Sci, AM Prokhorov Gen Phys Inst, 38 Vavilov Str, Moscow 119991, Russia

[2] Russian Acad Sci, NS Kurnakov Gen & Inorgan Chem Inst, Moscow 119991, Russia

[3] Moscow Inst Phys & Technol, Moscow 141700, Russia

[4] Ctr Surface & Vacuum Res, Moscow 119421, Russia

来源：

MICRO- AND NANOELECTRONICS 2007 | 2008年 / 7025卷

关键词：

atomic force microscope; calibration; test object; linewidth;

D O I：

10.1117/12.802427

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The article includes the results of the study of image formation in atomic force microscope (AFM). The influence of radius and angle characteristics of cantilever tip as well as the relief of the surface studied on the signal waveform is shown. The authors demonstrate the techniques of AFM calibration and direct measurement of linear sizes of trapezoid structures including the line width with the use of AFM signal and its first derivative. There were obtained the equations establishing relations the sizes of trapezoid structures with the sizes of test segments chosen on AFM signals.

引用

页数：10

共 50 条

[41] An Adaptive Analog Circuit for LVDT's Nanometer Measurement Without Losing Sensitivity and Range
Chen, Gang
Zhang, Bo
Liu, Pinkuan
Ding, Han
[J]. IEEE SENSORS JOURNAL, 2015, 15 (04) : 2248 - 2254
[42] DIRECT MEASUREMENT OF THE LONG-RANGE VANDERWAALS FORCES
KITCHENER, JA
PROSSER, AP
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1957, 242 (1230): : 403 - 409
[43] DIRECT MEASUREMENT OF LONG-RANGE VANDERWAALS FORCES
PROSSER, AP
KITCHENER, JA
[J]. NATURE, 1956, 178 (4546) : 1339 - 1340
[44] External cavity diode lasers with 5kHz linewidth and 200nm tuning range at 1.55μm and methods for linewidth measurement
Bennetts, Shayne
McDonald, Gordon D.
Hardman, Kyle S.
Debs, John E.
Kuhn, Carlos C. N.
Close, John D.
Robins, Nicholas P.
[J]. OPTICS EXPRESS, 2014, 22 (09): : 10642 - 10654
[45] Direct Measurement of the Adhesion Forces between Aramid Fiber-fibrids Surfaces by AFM
Zhang, Sufeng
Zhang, Meiyun
[J]. PROCEEDINGS OF INTERNATIONAL CONFERENCE ON PULPING, PAPERMAKING AND BIOTECHNOLOGY 2008: ICPPB '08, VOL 2, 2008, : 368 - 376
[46] Direct measurement of electrostatic fields using single Teflon nanoparticle attached to AFM tip
Joe-Ming Chang
Wei-Yu Chang
Fu-Rong Chen
Fan-Gang Tseng
[J]. Nanoscale Research Letters, 8
[47] Direct Measurement of the Local Glass Transition in Self-Assembled Copolymers with Nanometer Resolution
Christie, Dane
Register, Richard A.
Priestley, Rodney D.
[J]. ACS CENTRAL SCIENCE, 2018, 4 (04) : 504 - 511
[48] Direct measurement of electrostatic fields using single Teflon nanoparticle attached to AFM tip
Chang, Joe-Ming
Chang, Wei-Yu
Chen, Fu-Rong
Tseng, Fan-Gang
[J]. NANOSCALE RESEARCH LETTERS, 2013, 8 : 1 - 7
[49] Surface Topography Measurement: High lateral resolution and wide measurement range for structures with nanometer dimensions in industry, research, and laboratories
Tan, Özgür
Reiff, Ellen-Christine
[J]. PhotonicsViews, 2021, 18 (02) : 58 - 59
[50] An Approach towards the Measurement of Nanometer Range Distances Based on Cu2+ Ions and ESR
Yang, Zhongyu
Kise, Drew
Saxena, Sunil
[J]. JOURNAL OF PHYSICAL CHEMISTRY B, 2010, 114 (18): : 6165 - 6174

← 1 2 3 4 5 →