Design of Prototype Scientific CMOS Image Sensors

被引：5

作者：

Vu, Paul ^{[1
]}

Fowler, Boyd ^{[1
]}

Liu, Chiao ^{[1
]}

Balicki, Janusz ^{[1
]}

Mims, Steve ^{[1
]}

Do, Hung ^{[1
]}

Laxson, Dan ^{[1
]}

机构：

[1] Fairchild Imaging, Milpitas, CA 95035 USA

来源：

High Energy, Optical, and Infrared Detectors for Astronomy III | 2008年 / 7021卷

关键词：

Scientific CMOS image sensors; high-speed imager; low readout noise; 4T pixel design;

D O I：

10.1117/12.790229

中图分类号：

P1 [天文学];

学科分类号：

0704 ;

摘要：

We present the design and test results of a prototype 4T CMOS image sensor fabricated in 0.18-mu m technology featuring 20 different 6.5 mu m pixel pitch designs. We review the measured data which clearly show the impact of the pixel topologies on sensor performance parameters such as conversion gain, read noise, dark current, full well capacity, non-linearity, PRNU, DSNU, image lag, QE and MTF. Read noise of less than 1.5e- rms and peak QE greater than 70%, with microlens, are reported.

引用

页数：9

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