An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope

被引：0
|
作者：
Cui, Jian [1 ]
Guo, Z. Y. [1 ]
Zhao, Q. C. [1 ]
Yang, Z. C. [1 ]
Hao, Y. L. [1 ]
Yan, G. Z. [1 ]
机构：
[1] Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
来源：
MEMS/NEMS NANO TECHNOLOGY | 2011年 / 483卷
关键词：
MEMS Vibratory Gyroscope; Bandwidth; Electrostatic force feedback; Rebalance control; MICROGYROSCOPE;
D O I：
10.4028/www.scientific.net/KEM.483.43
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper proposed an effective approach for extending the bandwidth of M EMS vibratory gyroscope by employing the electrostatic force feedback control. The mathematical model for the bandwidth is established through the dynamic model of the gyroscope, which indicates that the bandwidth of the sensor depends on the difference between the resonant frequencies of the two working modes. The system bandwidth can be enlarged by utilizing electrostatic force rebalance control to null Coriolis force caused by external angular rate which can also improve the performance of the transient response. Simulation results forecast a satisfactory performance of the control system with suggested control method.
引用
收藏
页码：43 / 47
页数：5
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