[1] Chinese Acad Sci, Shenzhen Inst Adv Technol, Shenzhen 518055, Guangdong, Peoples R China
[2] Univ Barcelona, Inst Quim Teor & Barcelona, Dept Ciencia Mat & Quim Fis, Barcelona 08028, Spain
[3] Helmholtz Zentrum Dresden Rossendorf eV, Inst Ion Beam Phys & Mat Res, D-01328 Dresden, Germany
[4] Univ Technol Sydney, Inst Biomed Mat & Devices, Fac Sci, Sch Math & Phys Sci, Sydney, NSW 2007, Australia
[5] Leibniz Inst Solid State & Mat Res IFW, Inst Integrat Nanosci, Micro & NanoBiomed Engn Grp MNBE, D-01069 Dresden, Germany
[6] Tech Univ Dresden, Chair Micro & NanoSyst, Ctr Mol Bioengn B CUBE, D-01062 Dresden, Germany